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Introduction of Performance by Use
4 Semiconductor / LCD Manufacturing Equipment

Low Particle Emission Good Operability (Stable Dynamic Friction Force)

Combining the NSK K1 with LG2 grease for low particle Dynamic friction force is 1/3 of fluorine type grease (at 20 m/min).
emission is comparable to using vacuum grease. Test conditions
Test conditions Sample: LS20AL
Sample: LS20 Preload: Z1
Speed: 36 m/min
25

Comparison of particle emission characteristics Friction force, N 20

100 000 Fluorine type grease
15

Particle count (size 0.5 μm or larger) NSK K1+general grease 10
NSK K1+LG2 grease

5

10 000 0
0 5 10 15 20 25
Speed, m/min

1 000 Change of dynamic friction force (100% at the beginning)
100
NSK K1+LG2 Grease Change ratio, % 100
Vacuum grease 90
80
10 20 40 60 80 100 120 140 160 70 Sample: LH30AN
0 Time, hr 60 Installed NSK K1 with no grease
50 No NSK K1, AV2 grease lubricated
40
30 1 000 2 000 3 000 4 000 5 000 6 000 7 000 8 000 9 000 10 000
20 Running distance, km
10
0
0

High Performance Lubrication - Maintenance free Applications

Over 30 000 km running with only NSK K1. • LCD substrates polishing machines
Improved performance can be expected when used with • LCD glass substrates transporting machines
the LG2 Grease. • LCD glass substrates testing equipment
• Thin film processing equipment for semiconductors
Endurance test without additional lubrication • Washing machines
• Full automatic wafer mounters
Test conditions • Washing section of the wafer polishing machines
Sample: LH30AN • Carrier arm section of logic handler
Preload: Z1, Z3 • CMP

Speed: High speed test Medium speed test
Stroke: 200 m/min 60 m/min
Load: 1 800 mm 750 mm
63 N/1 ball slide None

Preload

NSK K1 Z1
(middle speed)